ASTRA Furnace Controller

The ASTRA Control System provides integrated control of all diffusion and LPCVD furnace system parameters. ASTRA is Ethernet-based using distributed control via a high-powered, tube-level microcomputer and intuitive, process-logical software.

 All ASTRA operations are accomplished through graphical and animated, touch screen access. Comprehensive data acquisition, logging and graphing provide real-time assessments for optimum process management

ASTRA Features

(Click feature for details)

    • Intel Core2Duo Processor.

    • DDRII RAM

    • High capacity hard drive.

    • Flash drive data transfer.

    • Printer module.

    • Microsoft Exel compatible.

    • Intuitive graphical touch interface

    • Fab-Friendly touch controls, even with gloves

    • Multiple control loops

    • Spike TC, profile TC or cascade control.

    • Auto profile or custom PID.

    • Programmable temperature tolerancing.

    • NIST offset program.

    • Data acquisition, logging and graphing.

    • 0.1oC control resolution.

    • Multiple MFC control loops.

    • Programmable flow tolerance monitor and alerts.

    • Fault redirects with abort or branch.

    • Interface programming of peripheral components.

    • Comprehensive LPCVD vacuum control monitoring.

    • LPCVD auto leak-test protocol.

    • Hardware and firmware safety interlock

    • Intelligent motor control.

    • Programmable motion and feedback logic.

    • End-of-travel sensing with next-step function.

    • Over-travel sensing with fault redirects.

    • Universal Compatibility!

    • 120/220/240VAC

    • 50 or 60 Hz

    • Included UPS for loss of power failsafe

    • Operation and programming

    • Navigate.

    • Password management and access rights.

    • Recipe editing.

    • Temperature parameters.

    • Gas/fluid parameters.

    • Vacuum paramters.

    • Loading parameters.

    • Step times and event response editing.

    • Calibrations.

    • Alarm fault redirects.

    • Hardwire relay logic and firmware interlocks.

ASTRA Benefits

  • Precise control of temperature, gas and fluid flow, vacuum and loading parameters for optimum process performance and repeatability.

  • Intuitive programming and operation through graphical touch screen access for easy training and operation. 

  • Tube-level microcomputer for high speed and masterful data management, which results in optimized yields and process tracking. 

  • Distributed control with full safety interlocks for gas flow, vacuum, temperature and loading, which provide safe, reliable operation. 

  • Optimized temperature control with divisible cascading and auto profiling to setup and maintain optimum temperature parameters.

  • User permissions protocols assure only qualified personnel can access programming, recipes and parameters.

  • Comprehensive alerts, alarms, redirects and monitors
    for all parameters. Provides instant responses, reporting and recording of anything that affects process performance or safety.

  • Full maintenance accessibility with integral trouble-
    shooting and calibrations. Provides data for maintenance with no additional maintenance computer required.

  • Advanced LPCVD control and monitoring functions for
    sustained process repeatability.

  • On-screen keyboard for easy data entry.

  • Lot tracking/run history for multiple lots per run. Allows recipe tracking of wafers and wafer lots.

  • Retrofitable to most any furnace brand or model. Modernizes all control attributes at low cost.

  • Optional ASTRA Host System. Provides centralized factory recipe management, downloading, data acquisition and logging for up to 99 tube-levels.

Controls Settings Screen

Data Log previous Process Run

Main Display with Alarm Notice